Browsing by author "Kuppuswamy, Vijaya Kumar Murugesan"
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Contact edge roughness: effects of dose and PAG concentration in EUV lithography
Kuppuswamy, Vijaya Kumar Murugesan; Constantoudis, Vassilios; Gogolides, Evangelos; Vaglio Pret, Alessandro; Gronheid, Roel (2011)