Browsing by author "OKa, Hironori"
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Enhancing Performance and Function of Polymethacrylate Extreme Ultraviolet Resists Using Area-Selective Deposition
Nye, Rachel; Van Dongen, Kaat; De Simone, Danilo; OKa, Hironori; Parsons, Gregory N.; Delabie, Annelies (2023)