Browsing by author "Gore, R."
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Properties of mesoporous low-k MSSQ based film prepared using macromolecular porogen
Baklanov, Mikhaïl; Jehoul, Christiane; Flannery, C. M.; Moguilnikov, Konstantin; Gore, R.; Gronbeck, D.; Prokopowicz, G.; Sullivan, C.; You, Y.; Pugliano, N.; Gallagher, M. (2002)