Browsing by author "Parsons, Gregory N."
Now showing items 1-3 of 3
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Enhancing Performance and Function of Polymethacrylate Extreme Ultraviolet Resists Using Area-Selective Deposition
Nye, Rachel; Van Dongen, Kaat; De Simone, Danilo; OKa, Hironori; Parsons, Gregory N.; Delabie, Annelies (2023) -
In situ analysis of nucleation reactions during TiCl4/H2O atomic layer deposition on SiO2 and H-terminated Si surfaces treated with a silane small molecule inhibitor
Clerix, Jan-Willem; Dianat, Golnaz; Delabie, Annelies; Parsons, Gregory N. (2023) -
Mechanisms for undesired nucleation on H-terminated Si and dimethylamino-trimethylsilane passivated SiO2 during TiO2 area-selective atomic layer deposition
Nye, Rachel; Song, Seung Keun; Van Dongen, Kaat; Delabie, Annelies; Parsons, Gregory N. (2022)