Browsing by author "Urenski, Ronen"
Now showing items 1-2 of 2
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Innovative scatterometry approach for self-aligned quadruple patterning (SAQP) process control
Gunay Demirkol, Anil; Altamirano Sanchez, Efrain; Héraud, Stéphane; Godny, Stephane; Charley, Anne-Laure; Leray, Philippe; Urenski, Ronen; Cohen, Oded; Turovets, Igor; Wolfling, Shay (2016) -
Scatterometry and X-ray metrology for in-line control of spin-transfer torque magnetic random access memory (STT-MRAM) devices
Crotti, Davide; Swerts, Johan; Yasin, Farrukh; Jossart, Nico; Souriau, Laurent; Kundu, Shreya; Urenski, Ronen; Urbanowicz, Adam M.; Koret, Roy; Figueiro, Nivea; Sendelbach, Matthew; Lee, Wei Ti; Shah, Kavita; Larson, Tom; Ger, Avron; Wolfling, Shay; Kar, Gouri Sankar (2018)