Browsing by author "Loo, J.J.G.P."
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Characterization of thermal and electrical stability of MOCVD HfO2-HfSiO4 dielectric layers with polysilicon electrodes for advanced CMOS technologies
Rittersma, Chris; Loo, Josine; Ponomarev, Youri; Verheijen, M.A.; Kaiser, M.; Roozeboom, F.; Van Elshocht, Sven; Caymax, Matty (2004)