Browsing by author "Siefke, Thomas"
Now showing items 1-2 of 2
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Simultaneous Dimensional and Analytical Characterization of Ordered Nanostructures
Hoenicke, Philipp; Kayser, Yves; Nikolaev, Konstantin, V; Soltwisch, Victor; Scheerder, Jeroen; Fleischmann, Claudia; Siefke, Thomas; Andrle, Anna; Gwalt, Grzegorz; Siewert, Frank; Davis, Jeffrey; Huth, Martin; Veloso, Anabela; Loo, Roger; Skroblin, Dieter; Steinert, Michael; Undisz, Andreas; Rettenmayr, Markus; Beckhoff, Burkhard (2022) -
Small target compatible dimensional and analytical metrology for semiconductor nanostructures using X-ray fluorescence techniques
Hoenicke, Philipp; Kayser, Yves; Soltwisch, Victor; Waehlish, Andre; Wauschkuhn, Nils; Scheerder, Jeroen; Fleischmann, Claudia; Bogdanowicz, Janusz; Charley, Anne-Laure; Veloso, Anabela; Loo, Roger; Mertens, Hans; Hikavyy, Andriy; Siefke, Thomas; Andrle, Anna; Gwalt, Grzegorz; Siewert, Frank; Ciesielski, Richard; Beckhoff, Burkhard (2023)