Browsing by author "Yi, He"
Now showing items 1-2 of 2
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Cross-sectional imaging of directed self-assembly block copolymers
Okabe, Kye; Yi, He; Tung, Maryann C; Tiberio, Richard; Bekaert, Joost; Gronheid, Roel; Wong, H.S. Philip (2015) -
Mandrel-based patterning: density multiplication techniques for15nm nodes
Bencher, Chris; Dai, Huixiong; Miao, Liyan; Chen, Yongmei; Xu, Ping; Chen, Yijian; Oemardani, Shiany; Sweis, Jason; Wiaux, Vincent; Hermans, Jan; Chang, Li-Wen; Bao, Xinyu; Yi, He; Wong, H.-S. Philippe (2011)