Browsing by author "Yanovitskaya, Z.S."
Now showing items 1-4 of 4
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Barrier deposition on porous low-k films
Shamiryan, Denis; Yanovitskaya, Z.S.; Iacopi, Francesca; Maex, Karen (2003) -
Evaluation of thin Ta(N) film integrity deposited on porous glasses
Shamiryan, Denis; Baklanov, Mikhaïl; Yanovitskaya, Z.S.; Zverev, A.V.; Tokei, Zsolt; Iacopi, Francesca; Maex, Karen (2003) -
Low dielectric constant materials for microelectronics
Maex, Karen; Baklanov, Mikhaïl; Shamiryan, Denis; Iacopi, Francesca; Brongersma, Sywert; Yanovitskaya, Z.S. (2003-06) -
Simulations of diffusion barrier deposition on porous low-k films
Yanovitskaya, Z.S.; Zverev, A.V.; Shamiryan, Denis; Maex, Karen (2003-11)