Browsing by author "Chen, Ying-Lin"
Now showing items 1-3 of 3
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Adhesion and collapse of extreme ultraviolet photoresists and the role of underlayers
Fallica, Roberto; Chen, Steven; De Simone, Danilo; Suh, Hyo Seon (2022) -
Scaling and readiness of underlayers for high-NA EUV lithography
Fallica, Roberto; De Simone, Danilo; Chen, Steven; Safdar, Muhammad; Suh, Hyo Seon (2022) -
Scaling and readiness of underlayers for high-numerical aperture extreme ultraviolet lithography
Fallica, Roberto; De Simone, Danilo; Chen, Steven; Safdar, Muhammad; Suh, Hyo Seon (2022)