Browsing by author "Mody, J."
Now showing items 1-2 of 2
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Atom probe tomography for 3D-dopant analysis in FinFET devices
Kambham, Ajay Kumar; Zschaetzsch, Gerd; Sasaki, Yuichiro; Togo, Mitsuhiro; Horiguchi, Naoto; Mody, J.; Florakis, Antonios; Gajula, D.R.; Kumar, Arul; Gilbert, Matthieu; Vandervorst, Wilfried (2012) -
High performance n-mos FinFET by damage-free, conformal extension doping
Zschaetzsch, Gerd; Sasaki, Y.; Hayashi, S.; Togo, Mitsuhiro; Chiarella, Thomas; Kambham, Ajay Kumar; Mody, J.; Douhard, Bastien; Horiguchi, Naoto; Mizuno, B.; Ogura, M.; Vandervorst, Wilfried (2011)