Browsing by author "Keuning, Wytze"
Now showing items 1-1 of 1
-
Thermal and plasma enhanced atomic layer deposition of Al2O3 on GaAs substrates
Sioncke, Sonja; Delabie, Annelies; Brammertz, Guy; Conard, Thierry; Franquet, Alexis; Caymax, Matty; Urbanczyk, Adam; Heyns, Marc; Meuris, Marc; Van Hemmen, J.L.; Keuning, Wytze; Kessels, W.M.M. (2009)