Browsing by author "Amanapu, H.P."
Now showing items 1-1 of 1
-
Investigation of guanidine carbonate-based slurries for chemical Mechanical polishing of Ru/TiN barrier films with minimal corrosion
Sagi, K.V.; Amanapu, H.P.; Teugels, Lieve; Babu, S.V. (2014)