Browsing by author "Yoshizawa, Masaki"
Now showing items 1-2 of 2
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Impact of the absorber thickness variation on the imaging performance of ArF immersion lithography
Yoshizawa, Masaki; Philipsen, Vicky; Leunissen, Peter (2005) -
The impact of hyper NA immersion lithography to reticles and design
Ronse, Kurt; Cheng, Shaunee; Ercken, Monique; Leunissen, Peter; Maenhoudt, Mireille; Vandenberghe, Geert; Yoshizawa, Masaki (2005)