Browsing by author "Miao, Liyan"

Now showing items 1-1 of 1

Mandrel-based patterning: density multiplication techniques for15nm nodes

Bencher, Chris; Dai, Huixiong; Miao, Liyan; Chen, Yongmei; Xu, Ping; Chen, Yijian; Oemardani, Shiany; Sweis, Jason; Wiaux, Vincent; Hermans, Jan; Chang, Li-Wen; Bao, Xinyu; Yi, He; Wong, H.-S. Philippe (2011)