Browsing by author "Marinov, D."
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Plasma enhanced atomic layer etching of high-k layers on WS2
de Marneffe, Jean-Francois; Marinov, D.; Goodyear, A.; Wyndaele, Pieter-Jan; St. J. Braithwaite, N.; Kundu, S.; Asselberghs, Inge; Cooke, M.; De Gendt, Stefan (2022)