Browsing by author "Neureuther, A. R."
Now showing items 1-2 of 2
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Massively parallel electromagnetic simulation for photolithographic applications
Wong, Alfred; Guerrieri, R.; Neureuther, A. R. (1995) -
Rigorous three-dimensional time-domain finite-difference electromagnetic simulation for photolithographic applications
Wong, Alfred; Neureuther, A. R. (1995)