Browsing by author "Ryu, Heon-Yul"
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Atomic resolution quality control for Fin oxide recess by atomic resolution profiler
Kim, Tae-Gon; Ryu, Heon-Yul; Kenis, Karine; Jo, Ah-jin; Cho, Sang-Joon; Park, Sang-il; Schmidt, Sebastian; Irmer, Bernd (2016)