Browsing by author "Vermeyen, Kenneth"
Now showing items 1-2 of 2
-
Cleaning of metal gate stacks for the sub 90nm technology node
Kraus, Harald; Vermeyen, Kenneth; Snow, Jim; Fyen, Wim; Mertens, Paul; Kovacs, Frederic (2003) -
Cleaning of metal gate stacks for the sub 90nm technology node
Snow, Jim; Kraus, Harald; Vermeyen, Kenneth; Fyen, Wim; Mertens, Paul; Kovacs, Frederic (2004)