Browsing by imec author "9b17c3c637adf614fc7347e7d2d8bd1e459cdf22"

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    • PZT micro-transfer printing for photonic MEMS 

      Ansari, Irfan; De Geest, Kobe; De Witte, Jasper; Vandekerckhove, Tom; Rijckaert, H.; Picavet, E.; Lievens, E.; Feutmba, G. F.; Van de Veire, T.; Kuyken, Bart; Beeckman, J.; Van Thourhout, Dries (2023)