Browsing by author "Kreissig, U."
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Factors affecting an efficient sealing of porous low-K dielectrics by physical vapor deposition Ta(N) thin films
Iacopi, Francesca; Tokei, Zsolt; Le, Quoc Toan; Shamiryan, Denis; Conard, Thierry; Brijs, Bert; Kreissig, U.; Van Hove, Marleen; Maex, Karen (2002)