Browsing by author "Kruv, Anastaiia"
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Investigation of Cl2 etch in view of extremely low temperature selective epitaxial processes
Hikavyy, Andriy; Kruv, Anastaiia; Van Opstal, Tinneke; De Vos, Brecht; Porret, Clément; Loo, Roger (2017) -
Investigation of Cl2 etch in view of extremely low temperature selective epitaxial processes
Hikavyy, Andriy; Kruv, Anastaiia; Van Opstal, Tinneke; Porret, Clément; Loo, Roger (2017)