Browsing by author "Burke, Edd"
Now showing items 1-1 of 1
-
Tungsten planarization by gas cluster ion beam with CHF3
Everaert, Jean-Luc; Fernandez, Luis; Vos, Ingrid; Van Ammel, Annemie; Vrancken, Christa; Dekoster, Johan; Burke, Edd; Vancoille, Eric (2013)