Browsing by author "Tarnowka, Alexandre"
Now showing items 1-2 of 2
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Cu/Low-k thickness measurement for advanced Cu CMP process development and control
Li, Yunlong; Heylen, Nancy; Delande, Tinne; Kellens, Kristof; Ong, Patrick; Leunissen, Peter; Tarnowka, Alexandre; Eliyahu, Aviv (2009-03) -
Optical metrology based post Cu CMP metal residue detection and characterization
Li, Yunlong; Tarnowka, Alexandre; Eliyahu, Aviv; Heylen, Nancy; Delande, Tinne; Favia, Paola; Bender, Hugo; Kellens, Kristof; Leunissen, Peter (2009)