Browsing by author "Khanh, N. Q."

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Economical shallow emitter formation by plasma immersion ion implantation and RTA process

Pinter, Istvan; Dusco, C.; Khanh, N. Q.; Adam, M.; Makaro, Z.; Barsony, I.; Sivoththaman, Sivanarayanamoorthy; Poortmans, Jef; Adriaenssens, G. (1998)
Plasma immersion ion implantation for shallow junctions in silicon

Pinter, Istvan; Abdulhadi, A. H.; Makaro, Z.; Khanh, N. Q.; Adam, M.; Barsony, I.; Poortmans, Jef; Sivoththaman, Sivanarayanamoorthy; Hai-Zhi, Song; Adriaenssens, G. (1999)