Browsing by author "Zuniga, Christian"
Now showing items 1-2 of 2
-
3D Mask modeling for EUV lithography
Mailfert, Julien; Zuniga, Christian; Philipsen, Vicky; Adam, Konstantinos; Lam, Michael; Word, James; Hendrickx, Eric; Vandenberghe, Geert; Smith, Bruce (2012) -
Modeling laser bandwidth for OPC applications
Zuniga, Christian; Adam, Kostas; Lam, Michael; Lalovic, Ivan; De Bisschop, Peter (2009)