Browsing by author "Valev, V."
Now showing items 1-1 of 1
-
Si passivation for Ge pMOSFETs: influence of Si precursor during RPCVD growth
Vincent, Benjamin; Loo, Roger; Vandervorst, Wilfried; Brammertz, Guy; Mitard, Jerome; De Jaeger, Brice; Valev, V.; Verbiest, T.; Takeuchi, S.; Zaima, S.; Rip, Jens; Brijs, Bert; Conard, Thierry; Caymax, Matty (2010)