Browsing by author "Van Setten, Eelco"
Now showing items 1-3 of 3
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Accurate models for EUV Lithography
Hendrickx, Eric; Lorusso, Gian; Van Setten, Eelco; Hansen, Steve; Jiang, Jiong; Liu, Wei; Chen, Luogi (2009) -
Fundamental understanding and experimental verification of bright versus dark field imaging
Davydova, Natalia; Finders, Jo; van Lare, Claire; McNamara, John; Van Setten, Eelco; Zekry, Joseph; Fliervoet, Timon; Carpaij, Rene; Franke, Joern-Holger; Frommhold, Andreas; Verch, Andreas; Kersteen, Grizelda; Capelli, Renzo (2020) -
Impact of an etched EUV mask black border on imaging and overlay
de Kruif, Rob; Davydova, Natalia; Connolly, Brid; Fukugami, Norihito; Lammers, Ad; Philipsen, Vicky; Kondo, Shinpei; Van Setten, Eelco; Vaenkatesan, Vidya; Zimmerman, John; Harned, Noreen (2012)