Browsing by author "Roze, Fabien"
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Microsecond UV laser annealing annihilating Ru grains smaller than electron mean free path
Lu, Lu; Jourdan, Nicolas; Daubriac, Richard; Tabata, Toshiyuki; Roze, Fabien; Thuries, Louis; Cristiano, Fuccio; Tokei, Zsolt (2023) -
UV nanosecond laser annealing for Ru interconnects
Jourdan, Nicolas; Roze, Fabien; Tabata, Toshiyuki; Lariviere, Stephane; Contino, Antonino; Mazzamuto, Fulvio; Tokei, Zsolt (2020)