Browsing by author "Alvis, R."
Now showing items 1-1 of 1
-
The influence of capping layer type on cobalt salicide formation in films and narrow lines
Besser, Paul; Lauwers, Anne; Roelandts, Nico; Maex, Karen; Blum, W.; Alvis, R.; Stucchi, Michele; de Potter de ten Broeck, Muriel (1998)