Browsing by author "Besson, P."
Now showing items 1-2 of 2
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Evolution of silicon cleaning technology over the last twenty years
Ruzyllo, J.; Hattori, T.; Novak, R.E.; Mertens, Paul; Besson, P. (2007) -
Management of metallic contamination in advanced IC manufacturing
Besson, P.; Bigot, C.; Grouillet, A.; Joly, J.P.; Claes, Martine; Bearda, Twan; Frickinger, J. (2005)