Browsing by imec author "c29f3b4e09e4eb97ba3dc549a8c389416792eba6"

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    • Reactive plasma cleaning and restoration of transition metal dichalcogenide monolayers 

      Marinov, Daniil; de Marneffe, Jean-Francois; Smets, Quentin; Arutchelvan, Goutham; Bal, Kristof M.; Voronina, Ekaterina; Rakhimova, Tatyana; Mankelevich, Yuri; El Kazzi, Salim; Nalin Mehta, Ankit; Wyndaele, Pieter-Jan; Heyne, Markus Hartmut; Zhang, Jianran; With, Patrick C.; Banerjee, Sreetama; Neyts, Erik C.; Asselberghs, Inge; Lin, Dennis; De Gendt, Stefan (2021)