Browsing by author "van de Kerkhof, Mark A."

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    • EUV vote-taking lithography: Crazy.... or not ? 

      Bekaert, Joost; De Bisschop, Peter; Beral, Christophe; Hendrickx, Eric; van de Kerkhof, Mark A.; Bouten, Sander; Kupers, Michiel; Schiffelers, Guido; Verduijn, Erik; Brunner, Timothy (2018)