Browsing by author "Borrello, Gianpaolo"
Now showing items 1-2 of 2
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Improved methodology for integrated k-value extractions
Ciofi, Ivan; Borrello, Gianpaolo; Madia, Oreste; Wilson, Chris; Vereecke, Bart; Beyer, Gerald (2012) -
Influence of varying porogen loads and different UV cures on low-k film characteristics
Farrel, Leo; Verdonck, Patrick; Van Besien, Els; Ciofi, Ivan; Borrello, Gianpaolo; Vanstreels, Kris; Mardani, Shabnam; Baklanov, Mikhaïl (2011)