Browsing by author "Khan, Zamran Zahoor"
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Quantification of area-selective deposition on nanometer-scale patterns using Rutherford backscattering spectrometry
Claessens, Niels; Khan, Zamran Zahoor; Rahnemaihaghighi, Negin; Delabie, Annelies; Vantomme, Andre; Vandervorst, Wilfried; Meersschaut, Johan (2022)