Browsing by author "Breitschwerdt, K."
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Thin film encapsulation of acceleration sensors using polysilicon sacrificial layers
Stahl, H.; Hoechst, A.; Fischer, F.; Metzger, L.; Reichenbach, R.; Laermer, F.; Kronmueller, S.; Breitschwerdt, K.; Gunn, R.; Watcham, S.; Rusu, Cristina; Witvrouw, Ann (2003)