Browsing by author "Willekers, Rob"

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    • Tool-to-tool optical proximity effect matching 

      Van Look, Lieve; Bekaert, Joost; De Bisschop, Peter; Van de Kerkhove, Jeroen; Vandenberghe, Geert; Schreel, Koen; Menger, Jasper; Schiffelers, Guido; Knols, Edwin; Willekers, Rob (2008)