Browsing by author "Tsau, Thomas"
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New Cu "Bulge-Out" Mechanism Supporting Sub Micron Scaling of Hybrid Wafer-to- Wafer Bonding
De Messemaeker, Joke; Witters, Liesbeth; Zhang, Boyao; Tsau, Thomas; Fodor, Ferenc; De Vos, Joeri; Beyer, Gerald; Croes, Kristof; Beyne, Eric (2023)