Browsing imec Publications by author "Abramovitz, Yaniv"

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    • Recess metrology challenges for 3D device architectures in advanced technology nodes 

      Santoro, Gaetano; Houchens, Kevin; Bogdanowicz, Janusz; Elizov, Moshe; Yaron, Lior; Chemama, Michael; Goldenshtein, Alex; Zakay, Amit; Amit, Noam; Briggs, Basoene; Pacco, Antoine; Delhougne, Romain; Cockburn, Andrew; Abramovitz, Yaniv; Tam, Aviram; Adan, Ofer; Mertens, Hans; Charley, Anne-Laure; Horiguchi, Naoto; Leray, Philippe; Lorusso, Gian (2022)