Browsing imec Publications by author "Taichi, Nishio"
Now showing items 1-1 of 1
-
Dependence of etching rate on aspect ratio for high aspect TSV etching
Taichi, Nishio; Aoi, Nobuo; Sasago, Masaru; Kubota, Masafumi; Kostermans, Maarten; Brouri, Mohand; Dupont, Tania (2010)