Mikroantrieb in MEMS-Technologie nach dem Inchworm-Prinzip
| dc.contributor.author | Erismis, Mehmet Akif | |
| dc.date.accessioned | 2021-10-18T16:15:59Z | |
| dc.date.available | 2021-10-18T16:15:59Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17081 | |
| dc.source | IIOimport | |
| dc.title | Mikroantrieb in MEMS-Technologie nach dem Inchworm-Prinzip | |
| dc.type | Journal article | |
| dc.source.peerreview | no | |
| dc.source.beginpage | 55 | |
| dc.source.endpage | 56 | |
| dc.source.journal | Markt&Technik | |
| imec.availability | Published - imec | |
| imec.internalnotes | Special Issue (Sonderheft Halbleiter) |
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