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Electrical characterization of CNT contacts with Cu damascene top contact

dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorVereecke, Bart
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorCott, Daire
dc.contributor.authorMasahito, Sugiura
dc.contributor.authorKashiwagi, Yusaku
dc.contributor.authorTeugels, Lieve
dc.contributor.authorCaluwaerts, Rudy
dc.contributor.authorChiodarelli, Nicolo
dc.contributor.authorVereecken, Philippe
dc.contributor.authorBeyer, Gerald
dc.contributor.authorHeyns, Marc
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-21T13:21:17Z
dc.date.available2021-10-21T13:21:17Z
dc.date.issued2013
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23244
dc.sourceIIOimport
dc.titleElectrical characterization of CNT contacts with Cu damascene top contact
dc.typeJournal article
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorVereecke, Bart
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorCaluwaerts, Rudy
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage106
dc.source.endpage111
dc.source.journalMicroelectronic Engineering
dc.source.volume106
dc.identifier.urlhttp://dx.doi.org/10.1016/j.mee.2012.09.004
imec.availabilityPublished - open access


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