Browsing Book chapters by imec author "124e89b0b3ed6f3657cc1f208d7fa2ffa2880367"
Now showing items 1-2 of 2
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In-line wafer-level monitoring of the strain gradient in MEMS structural layers using an optical interferometer
Varela Pedreira, Olalla; De Coster, Jeroen; Severi, Simone; De Wolf, Ingrid (2012) -
Reliability of RF MEMS
De Wolf, Ingrid; Czarnecki, Piotr; De Coster, Jeroen; Varela Pedreira, Olalla; Rottenberg, Xavier; Sangameswaran, Sandeep (2013)