Browsing Book chapters by imec author "9b45b6c324cb20977333e4f2f9a39210f8e84211"
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Dry etching patterning requirements for multi-gate devices
Altamirano Sanchez, Efrain; Vandeweyer, Tom; Demand, Marc; Boullart, Werner (2013-09) -
Low-voltage scaled 6T FinFET SRAM cells
Collaert, Nadine; von Arnim, Klaus; Rooyackers, Rita; Vandeweyer, Tom; Mercha, Abdelkarim; Parvais, Bertrand; Witters, Liesbeth; Nackaerts, Axel; Altamirano Sanchez, Efrain; Demand, Marc; Hikavyy, Andriy; Demuynck, Steven; Devriendt, Katia; Bauer, F.; Ferain, Isabelle; Veloso, Anabela; De Meyer, Kristin; Biesemans, Serge; Jurczak, Gosia (2010-08)