Browsing Book chapters by imec author "d138fd063ddcb93bd3241272fef3d9aab899cf23"

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    • Front end of the line process 

      Han, Jeong Hwan; Cho, Moon Ju; Delabie, Annelies; Park, Tae Joo; Hwang, cheol seong (2014)

    • Germanium deep-submicron p-FET and n-FET devices, fabricated on germanium-on-insulator substrates 

      Meuris, Marc; De Jaeger, Brice; Van Steenbergen, Jan; Bonzom, Renaud; Caymax, Matty; Houssa, Michel; Kaczer, Ben; Leys, Frederik; Martens, Koen; Opsomer, Karl; Pourghaderi, Mohammad Ali; Satta, Alessandra; Simoen, Eddy; Terzieva, Valentina; Van Moorhem, Els; Winderickx, Gillis; Loo, Roger; Clarysse, Trudo; Conard, Thierry; Delabie, Annelies; Hellin, David; Janssens, Tom; Onsia, Bart; Sioncke, Sonja; Mertens, Paul; Snow, Jim; Van Elshocht, Sven; Vandervorst, Wilfried; Zimmerman, Paul; Brunco, David; Raskin, G.; Letertre, F.; Akatsu, T.; Billon, T.; Heyns, Marc (2007)