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Power spectral density as template for modeling a metal-oxide nanocluster resist to obtain accurate resist roughness profiles

dc.contributor.authorSeveri, Joren
dc.contributor.authorWelling, Ulrich
dc.contributor.authorDe Simone, Danilo
dc.contributor.authorDe Gendt, Stefan
dc.date.accessioned2023-01-17T08:25:14Z
dc.date.available2021-11-02T16:00:26Z
dc.date.available2023-01-17T08:25:14Z
dc.date.issued2021
dc.identifier.issn1932-5150
dc.identifier.otherWOS:000670414000014
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/37828.2
dc.sourceWOS
dc.titlePower spectral density as template for modeling a metal-oxide nanocluster resist to obtain accurate resist roughness profiles
dc.typeJournal article
dc.contributor.imecauthorSeveri, Joren
dc.contributor.imecauthorDe Simone, Danilo
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecDe Simone, Danilo::0000-0003-3927-5207
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.identifier.doi10.1117/1.JMM.20.2.024601
dc.source.numberofpages14
dc.source.peerreviewyes
dc.source.beginpage024601
dc.source.endpagena
dc.source.journalJOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3
dc.source.issue2
dc.source.volume20
imec.availabilityPublished - imec


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220.500.12860/37828.2*2023-01-17T08:24:26Zvalidation by library/open access desk
120.500.12860/378282021-11-02T16:00:26Z

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