dc.contributor.author | Nye, Rachel | |
dc.contributor.author | Song, Seung Keun | |
dc.contributor.author | Van Dongen, Kaat | |
dc.contributor.author | Delabie, Annelies | |
dc.contributor.author | Parsons, Gregory N. | |
dc.date.accessioned | 2023-05-25T13:09:43Z | |
dc.date.available | 2022-11-20T03:11:54Z | |
dc.date.available | 2023-05-25T13:09:43Z | |
dc.date.issued | 2022 | |
dc.identifier.issn | 0003-6951 | |
dc.identifier.other | WOS:000883065000012 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40762.3 | |
dc.source | WOS | |
dc.title | Mechanisms for undesired nucleation on H-terminated Si and dimethylamino-trimethylsilane passivated SiO2 during TiO2 area-selective atomic layer deposition | |
dc.type | Journal article | |
dc.contributor.imecauthor | Nye, Rachel | |
dc.contributor.imecauthor | Van Dongen, Kaat | |
dc.contributor.imecauthor | Delabie, Annelies | |
dc.contributor.orcidimec | Delabie, Annelies::0000-0001-9739-7419 | |
dc.date.embargo | 2023-08-22 | |
dc.identifier.doi | 10.1063/5.0106132 | |
dc.source.numberofpages | 6 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art. 082102 | |
dc.source.endpage | na | |
dc.source.journal | APPLIED PHYSICS LETTERS | |
dc.source.issue | 8 | |
dc.source.volume | 121 | |
imec.availability | Published - open access | |
dc.description.wosFundingText | This project has received funding from the Electronic Component Systems for European Leadership Joint Undertaking under the Grant Agreement No. 692522. The authors also acknowledge funding from the Semiconductor Research Corporation, Task No. 2974.001. The authors would like to thank Ilse Hoflijk, Thierry Conard, Johan Desmet, and Johan Meersschaut (imec, Belgium) for their discussions involving XPS and RBS characterization and data analysis. Additionally, Jan-Willem Clerix is thanked for his insightful discussions on TiO<INF>2</INF> nucleation mechanisms. This work was performed in part at the Analytical Instrumentation Facility (AIF) at North Carolina State University, which is supported by the State of North Carolina and the National Science Foundation (Award No. ECCS-2025064). The AIF is a member of the North Carolina Research Triangle Nanotechnology Network (RTNN), a site in the National Nanotechnology Coordinated Infrastructure (NNCI). | |