dc.contributor.author | Saadeh, Qais | |
dc.contributor.author | Naujok, Philipp | |
dc.contributor.author | Thakare, Devesh | |
dc.contributor.author | Wu, Meiyi | |
dc.contributor.author | Philipsen, Vicky | |
dc.contributor.author | Scholze, Frank | |
dc.contributor.author | Buchholz, Christian | |
dc.contributor.author | Salami, Zanyar | |
dc.contributor.author | Abdulhadi, Yasser | |
dc.contributor.author | Garcia, Danilo Ocana | |
dc.contributor.author | Mentzel, Heiko | |
dc.contributor.author | Babuschkin, Anja | |
dc.contributor.author | Laubis, Christian | |
dc.contributor.author | Soltwisch, Victor | |
dc.date.accessioned | 2023-06-29T14:00:05Z | |
dc.date.available | 2023-02-26T03:28:00Z | |
dc.date.available | 2023-06-29T14:00:05Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 0030-4026 | |
dc.identifier.other | WOS:000918421900001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/41149.4 | |
dc.source | WOS | |
dc.title | On the optical constants of cobalt in the M-absorption edge region | |
dc.type | Journal article | |
dc.contributor.imecauthor | Thakare, Devesh | |
dc.contributor.imecauthor | Wu, Meiyi | |
dc.contributor.imecauthor | Philipsen, Vicky | |
dc.contributor.orcidimec | Thakare, Devesh::0000-0003-3265-7042 | |
dc.contributor.orcidimec | Philipsen, Vicky::0000-0002-2959-432X | |
dc.date.embargo | 2023-02-28 | |
dc.identifier.doi | 10.1016/j.ijleo.2022.170455 | |
dc.source.numberofpages | 14 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art.: 170455 | |
dc.source.endpage | na | |
dc.source.journal | OPTIK | |
dc.source.issue | February | |
dc.source.volume | 273 | |
imec.availability | Published - open access | |
dc.description.wosFundingText | This project has received funding from the Electronic Component Systems for European Leadership Joint Undertaking under grant agreement No 783247 - Technology Advances for Pilot line of Enhanced Semiconductors for 3 nm (TAPES3) and from the European Metrology Programme for Innovation and Research (EMPIR) programme under grant No 20IND04-Traceable Metrology of Soft X-ray to IR Optical Constants and Nanofilms for Advanced Manufacturing (ATMOC) . These Joint Undertakings receive support from the European Union?s Horizon 2020 research and innovation program and from Netherlands, France, Belgium, Germany, Czech Republic, Austria, Hungary, Israel, Switzerland, Turkey, Denmark and Finland. Also, the authors would like to thank Olivier Richard from Materials and Component Analysis (MCA) department at imec for TEM and EDS reports. | |