dc.contributor.author | Kaneda, Yukio | |
dc.contributor.author | Nye, Rachel | |
dc.contributor.author | Marques, Esteban | |
dc.contributor.author | Armini, Silvia | |
dc.contributor.author | Delabie, Annelies | |
dc.contributor.author | van Setten, Michiel | |
dc.contributor.author | Pourtois, Geoffrey | |
dc.date.accessioned | 2023-08-02T19:53:47Z | |
dc.date.available | 2023-06-28T19:48:19Z | |
dc.date.available | 2023-07-26T08:05:09Z | |
dc.date.available | 2023-08-02T19:53:47Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 1932-7447 | |
dc.identifier.other | WOS:001006309900001 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42104.3 | |
dc.source | WOS | |
dc.title | A First-Principles Investigation of the Driving Forces Defining the Selectivity of TiO2 Atomic Layer Deposition | |
dc.type | Journal article | |
dc.contributor.imecauthor | Nye, Rachel | |
dc.contributor.imecauthor | Marques, Esteban | |
dc.contributor.imecauthor | Armini, Silvia | |
dc.contributor.imecauthor | Delabie, Annelies | |
dc.contributor.imecauthor | van Setten, Michiel | |
dc.contributor.imecauthor | Pourtois, Geoffrey | |
dc.contributor.orcidimec | Armini, Silvia::0000-0003-0578-3422 | |
dc.contributor.orcidimec | Delabie, Annelies::0000-0001-9739-7419 | |
dc.contributor.orcidimec | Pourtois, Geoffrey::0000-0003-2597-8534 | |
dc.contributor.orcidimec | van Setten, Michiel::0000-0003-0557-5260 | |
dc.identifier.doi | 10.1021/acs.jpcc.3c00965 | |
dc.source.numberofpages | 12 | |
dc.source.peerreview | yes | |
dc.subject.discipline | Materials science | |
dc.source.beginpage | 10303 | |
dc.source.endpage | 10314 | |
dc.source.journal | JOURNAL OF PHYSICAL CHEMISTRY C | |
dc.source.issue | 21 | |
dc.source.volume | 127 | |
imec.availability | Published - imec | |