dc.contributor.author | Van Damme, Jacques | |
dc.contributor.author | Ivanov, Tsvetan | |
dc.contributor.author | Favia, Paola | |
dc.contributor.author | Conard, Thierry | |
dc.contributor.author | Verjauw, Jeroen | |
dc.contributor.author | Acharya, Rohith | |
dc.contributor.author | Perez Lozano, Daniel | |
dc.contributor.author | Raes, B. | |
dc.contributor.author | Van de Vondel, J. | |
dc.contributor.author | Ananthapadmanabha Rao, Vadiraj | |
dc.contributor.author | Mongillo, Massimo | |
dc.contributor.author | Wan, Danny | |
dc.contributor.author | De Boeck, Jo | |
dc.contributor.author | Potocnik, Anton | |
dc.contributor.author | De Greve, Kristiaan | |
dc.date.accessioned | 2023-12-04T10:34:34Z | |
dc.date.available | 2023-09-03T17:38:47Z | |
dc.date.available | 2023-12-04T10:34:34Z | |
dc.date.issued | 2023 | |
dc.identifier.issn | 2331-7019 | |
dc.identifier.other | WOS:001051969100002 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42448.2 | |
dc.source | WOS | |
dc.title | Argon-Milling-Induced Decoherence Mechanisms in Superconducting Quantum Circuits | |
dc.type | Journal article | |
dc.contributor.imecauthor | Van Damme, Jacques | |
dc.contributor.imecauthor | Ivanov, Tsvetan | |
dc.contributor.imecauthor | Favia, Paola | |
dc.contributor.imecauthor | Conard, Thierry | |
dc.contributor.imecauthor | Verjauw, Jeroen | |
dc.contributor.imecauthor | Acharya, Rohith | |
dc.contributor.imecauthor | Perez Lozano, Daniel | |
dc.contributor.imecauthor | Ananthapadmanabha Rao, Vadiraj | |
dc.contributor.imecauthor | Mongillo, Massimo | |
dc.contributor.imecauthor | Wan, Danny | |
dc.contributor.imecauthor | De Boeck, Jo | |
dc.contributor.imecauthor | Potocnik, Anton | |
dc.contributor.imecauthor | De Greve, Kristiaan | |
dc.contributor.orcidimec | Van Damme, Jacques::0000-0002-8938-4383 | |
dc.contributor.orcidimec | Ivanov, Tsvetan::0000-0003-3407-2742 | |
dc.contributor.orcidimec | Favia, Paola::0000-0002-1019-3497 | |
dc.contributor.orcidimec | Conard, Thierry::0000-0002-4298-5851 | |
dc.contributor.orcidimec | Verjauw, Jeroen::0000-0002-4215-8688 | |
dc.contributor.orcidimec | Acharya, Rohith::0000-0003-3958-6435 | |
dc.contributor.orcidimec | Perez Lozano, Daniel::0000-0003-3098-3266 | |
dc.contributor.orcidimec | Ananthapadmanabha Rao, Vadiraj::0000-0001-8676-5044 | |
dc.contributor.orcidimec | Mongillo, Massimo::0000-0002-6475-6320 | |
dc.contributor.orcidimec | Wan, Danny::0000-0003-4847-3184 | |
dc.contributor.orcidimec | De Boeck, Jo::0000-0001-8244-1552 | |
dc.contributor.orcidimec | Potocnik, Anton::0000-0002-0352-6388 | |
dc.contributor.orcidimec | De Greve, Kristiaan::0000-0002-1314-9715 | |
dc.date.embargo | 2023-12-31 | |
dc.identifier.doi | 10.1103/PhysRevApplied.20.014034 | |
dc.source.numberofpages | 15 | |
dc.source.peerreview | yes | |
dc.source.beginpage | Art. 014034 | |
dc.source.endpage | na | |
dc.source.journal | PHYSICAL REVIEW APPLIED | |
dc.source.issue | 1 | |
dc.source.volume | 20 | |
imec.availability | Published - open access | |
dc.description.wosFundingText | The authors are thankful for the Imec P-line, for pro- viding processing support, and to Danielle Vanhaeren, Olivier Richard, Laura Nelissen, Kris Paulussen, and Ilse Hoflijk for metrology support. This work is funded, in part, by the Imec Industrial Affiliation Program on Quantum Computing, and by the ECSEL Joint Undertaking (JU) under Grant Agreement No. 101007322. The JU receives support from the European Union's Horizon 2020 research and innovation program and Germany, France, Belgium, Austria, Netherlands, Finland, Israel (please visit the project website www.matqu.eu for more information) . J.V.D. acknowledges the support of the Research Foundation - Flanders (FWO) through the SB Ph.D. program (Grant No. 1S15722N) . The authors would also like to thank Professor W. De Roeck, Professor N. de Leon, Pro- fessor R. McDermott, Dr. J. Bejanin, and Dr. T. Maeder for insightful comments and discussions, and Professor A. Wallraff for providing lumped -element resonator designs. | |